Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces | Patent Publication Number 20070049179

US 20070049179 A1
Patent NumberUS 07326105 B2
Application Number11217151
Filled DateAug 31, 2005
Priority DateAug 31, 2005
Publication DateMar 1, 2007
Original AssigneeInnovative Micro Technology
Micron Technology Inc.
Current AssigneeMicron Technology Inc.
Micron Semiconductor Inc.
Inventor/ApplicantsNagasubramaniyan Chandrasekaran
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