Projection objective for a microlithographic projection exposure apparatus | Patent Application Number 13272440

13272440
Not Appealed
Patent NumberUS 08902407 B2
Publication NumberUS 20120033296 A1
Filled DateOct 13, 2011
Priority DateJun 10, 2004
Inventor/ApplicantsNorbert Wabra
Robert Eder
ExaminesKREUTZER, COLIN WRIGHT
Art Unit2882
Technology Center2800
Assignments
Carl Zeiss Smt Gmbh
Current
Carl Zeiss Smt GmbhCarlzeissstiftung
Original
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