Projection objective for a microlithographic projection exposure apparatus | Patent Publication Number 20120033296

US 20120033296 A1

Patent NumberUS 08902407 B2

Application Number13272440

Filled DateOct 13, 2011

Priority DateJun 10, 2004

Publication DateFeb 9, 2012

Original AssigneeCarlzeissstiftung

Current AssigneeCarl Zeiss Smt Gmbh

Inventor/ApplicantsNorbert Wabra
Robert Eder

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