Projection objective for a microlithographic projection exposure apparatus | Patent Number 08902407

US 08902407 B2
Application Number13272440
Publication NumberUS 20120033296 A1
Pendency3 years, 1 month, 21 days
Filled DateOct 13, 2011
Priority DateJun 10, 2004
Publication DateFeb 9, 2012
Expiration DateJun 10, 2024
Inventor/ApplicantsRobert Eder
Norbert Wabra
ExaminesKREUTZER, COLIN WRIGHT
Art Unit2882
Technology Center2800
Assignments
Carl Zeiss Smt Gmbh
Current
Carl Zeiss Smt GmbhCarlzeissstiftung
Original
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