Method for protecting a gate structure during contact formation | Patent Application Number 13944335

13944335
Not Appealed
Patent NumberUS 08648446 B2
Publication NumberUS 20130299921 A1
Filled DateJul 17, 2013
Priority DateApr 22, 2009
Inventor/ApplicantsHong-Dyi Chang
Kong-Beng Thei
Harry Hak-Lay Chuang
Hun-Jan Tao
Pei-Chao Su
ExaminesPICARDAT, KEVIN M
Art Unit2822
Technology Center2800
Assignments
Taiwan Semiconductor Manufacturing Company
Current
Taiwan Semiconductor Manufacturing Company
Original
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