Method for protecting a gate structure during contact formation | Patent Number 08648446

US 08648446 B2
Application Number13944335
Publication NumberUS 20130299921 A1
Pendency6 months, 29 days
Filled DateJul 17, 2013
Priority DateApr 22, 2009
Publication DateNov 14, 2013
Expiration DateApr 21, 2029
Inventor/ApplicantsHarry Hak-Lay Chuang
Kong-Beng Thei
Hong-Dyi Chang
Pei-Chao Su
Hun-Jan Tao
ExaminesPICARDAT, KEVIN M
Art Unit2822
Technology Center2800
Assignments
Taiwan Semiconductor Manufacturing Company
Current
Taiwan Semiconductor Manufacturing Company
Original
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