Fabrication method and fabrication apparatus for thin film transistor | Patent Application Number 9440615
9440615
Appealed
Patent NumberUS 06579749 B2
Publication NumberUS 20020009836 A1
Filled DateNov 15, 1999
Priority DateNov 15, 1999
Inventor/ApplicantsKAZUSHIGE TAKECHI
Kazushige Takechi
Kazushige Takechi
ExaminesMENZ, LAURA MARY
Art Unit2813
Technology Center2800
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