Fabrication method and fabrication apparatus for thin film transistor | Patent Publication Number 20020009836

US 20020009836 A1

Patent NumberUS 06579749 B2

Application Number9440615

Filled DateNov 15, 1999

Priority DateNov 15, 1999

Publication DateJan 24, 2002

Original AssigneeAt&t Company

Current AssigneeGetner Foundation Llc

Inventor/ApplicantsKAZUSHIGE TAKECHI
Kazushige Takechi

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