Fabrication method and fabrication apparatus for thin film transistor | Patent Number 06579749

US 06579749 B2
Application Number9440615
Publication NumberUS 20020009836 A1
Pendency3 years, 7 months, 5 days
Filled DateNov 15, 1999
Priority DateNov 15, 1999
Publication DateJan 24, 2002
Expiration DateNov 15, 2019
Inventor/ApplicantsKAZUSHIGE TAKECHI
Kazushige Takechi
ExaminesMENZ, LAURA MARY
Art Unit2813
Technology Center2800
Assignments
Getner Foundation Llc
Current
Nec CorporationAt&t Company
Original
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