High deposition rate sputtering | Patent Publication Number 20050252763

US 20050252763 A1
Patent NumberUS 07811421 B2
Application Number11183463
Filled DateJul 18, 2005
Priority DateMar 28, 2005
Publication DateNov 17, 2005
Original AssigneeZond
Current AssigneeZond
Inventor/ApplicantsRoman Chistyakov
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