High deposition rate sputtering | Patent Publication Number 20050252763
US 20050252763 A1Patent NumberUS 07811421 B2
Application Number11183463
Filled DateJul 18, 2005
Priority DateMar 28, 2005
Empower your practice with Patexia Publication Prosecution IP Module.
Get access to our exclusive rankings and unlock powerful data.
Looking for a Publication Attorney?
Get in touch with our team or create your account to start exploring a
network of over 120K attorneys.