Local interconnect structures for high density | Patent Publication Number 20140264629

US 20140264629 A1
Patent NumberUS 09024418 B2
Application Number13829864
Filled DateMar 14, 2013
Priority DateMar 14, 2013
Publication DateSep 18, 2014
Inventor/ApplicantsJohn Jianhong Zhu
Giridhar Nallapati
PR Chidambaram
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